Datapaq Temperature Measurement System for Thin Film Process/Vacuum Process
A temperature measurement system specifically designed for measuring the temperature of products during the thin film process.
The temperature measurement system for film deposition and vacuum processes by Fluke Process Instruments (formerly known as Datapaq) can be introduced into film deposition equipment by using a specially designed heat-resistant case that protects the temperature data logger from heat. By specializing for use in a vacuum, we have succeeded in miniaturizing the heat-resistant case, enabling product temperature measurement in various film deposition devices that could not be used with existing heat-resistant cases due to dimensional constraints. The DP5 series data logger allows users to replace the battery, achieving a reduction in total cost of ownership (TCO) and minimizing downtime.
- Company：テクノアルファ
- Price：Other
